News Release
ALIO Industries Offers a Cost Effective Semiconductor Metrology Platform
PrintWheat Ridge, Co - ALIO Industries introduces a new line of metrology systems based on ALIO's standard Nano precision product platforms. These metrology systems use high precision crossed roller bearing XY stages with proven air bearing like performance that will far exceed legacy products currently available on the market today.
ALIO Industries mechanical bearing XY stage is designed to exceed past designs with sub micron precision. With laser tested flatness and straightness of less than +/-1um per 150mm of travel, ALIO's linear stages are an order of magnitude flatter and straighter than the industry standard of +/-2um per 25mm thus lending themselves to metrology applications were air bearings were previously required. Calibrated accuracy of less than +/- 0.2 microns over 300 mm travel is also available.
Current legacy design standards on the market for a vertical motion metrology have been limited to the z-wedge stages. This design fails to be precise due to multiple mechanical bearings and multiple machined components that are difficult to hold tight tolerances due to the angled surfaces. The accuracy, straightness, pitch, yaw and roll specifications of a z-wedge suffer due to the large number of error components associated with the design. ALIO Industries' response is a precision vertical air bearing solution ensuring industry leading performance. Our design incorporates purely linear technology ensuring the removal of parasitic errors and quick response time due to the linear actuators. The ALIO NANO-Z design has less than +/- 0.05microns of accuracy over 25 mm of travel to exceed focusing needs of todays and tomorrows metrology systems.
The combination of ALIO's metrology grade XY stage with the NANO-Z stage brings a new matrix to cost effective ultra precision metrology.
ALIO, Latin for "a new way or a better way", is dedicated to leading the world with new innovation and industry leading ultra precision stages and motions systems.
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